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128｡ﾟ128-element silicon microlens array fabricated by ion-beam etching for PtSi IRCCD

Author(s):
  • Zhang,X. ( Huazhong Univ.of Science and Technology (China) )
  • Yi,X. ( Huazhong Univ.of Science and Technology (China) )
  • He,M. ( Huazhong Univ.of Science and Technology (China) )
  • Zhao,X. ( Huazhong Univ.of Science and Technology (China) )
Publication title:
Integrated Optoelectronics II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3551
Pub. Year:
1998
Page(from):
191
Page(to):
198
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430120 [0819430129]
Language:
English
Call no.:
P63600/3551
Type:
Conference Proceedings

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