Blank Cover Image

Physical and electrical properties of polycrystalline silicon thin films

Author(s):
Saraswat, Krishna C. ( Integrated Circuits Laboratory, Stanford University )  
Publication title:
Grain boundaries in semiconductors : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
5
Pub. Year:
1982
Page(from):
261
Page(to):
274
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444006974 [0444006974]
Language:
English
Call no.:
M23500/5
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Evidence for Heterojunction Effects in Polycrystalline Si1-xGex Thin Film Transistors With Si Caps

Wang, Albert W., Saraswat, Krishna C.

MRS - Materials Research Society
7 Conference Proceedings PHYSICAL AND ELECTRICAL PROPERTIES OF IRIDIUM THIN FILMS

Elliman, R. G., Lawn, M. A., Reeves, G. K., Jagadish, C.

Materials Research Society
2 Conference Proceedings Passivation of Poly-Si Thin-Film Transistors With Ion-Implanted Deuterium

Wang, Albert W., Saraswat, Krishna C.

MRS - Materials Research Society
8 Conference Proceedings Defect Population and Electrical Properties of Ar+-Laser Crystallized Polycrystalline Silicon Thin Films

Christiansen, S., Nerding, M., Eder, C., Andrae, G., Falk, F., Bergmann, J., Ose, M., Strunk, H.P.

Materials Research Society
3 Conference Proceedings *ELECTRICAL PROPERTIES OF POLYCRYSTALLINE-SILICON THIN FILMS FOR VLSI

Kamins, T.I.

Materials Research Society
9 Conference Proceedings Effect of a silicon interlayer in low-temperature poly-SiGe thin film transistors

Wang,A.W., Saraswat,K.C.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings TMCTS for Gate Dielectric in Thin-Film Transistors

Wang, Albert W., Bhat, Navakanta, Saraswat, Krishna C.

MRS - Materials Research Society
10 Conference Proceedings Electrical Hysteresis Behavior of Low Temperature Polycrystalline Silicon Thin Film Transistors

D. Nam, H. Lee, S. Jung, T. Ahn, C. Kim

Electrochemical Society
5 Conference Proceedings A Low-Temperature Polycrystalline Si TFT Technology for Larg-Area AMLCD Drivers

Saraswat, Krishna C., Subramanian, V., Jurichich, S.

MRS - Materials Research Society
11 Conference Proceedings Physical and Electrical Properties of Yttrium Silicate Thin Films

Chambers, James Joseph, Parsons, Gregory N.

Materials Research Society
6 Conference Proceedings Electrical Properties of Undoped Polycrystalline Diamond Thin Films on Silicon

Jauhiainen, Anders, Bengtsson, Stefan, Engstrom, Olof

MRS - Materials Research Society
12 Conference Proceedings Response surface optimization for high-performance solid-phase crystallized silicon-germanium thin film transistors

Subramanian,V., Saraswat,K.C., Hovagimian,H., Mehlhaff,J.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12