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Chemical and ion beam etch studies of polycrystalline silicon

Author(s):
Lester, P.A. ( Department of Engineering Science and Mechanics, The Pennsylvania State University )
Singh, R. ( Department of Engineering Science and Mechanics, The Pennsylvania State University )
Rice, D.A. ( Department of Engineering Science and Mechanics, The Pennsylvania State University )
Pangborn, R.N. ( Department of Engineering Science and Mechanics, The Pennsylvania State University )
Ashok, S. ( Department of Engineering Science and Mechanics, The Pennsylvania State University )
Fonash, S.J. ( Department of Engineering Science and Mechanics, The Pennsylvania State University )
1 more
Publication title:
Grain boundaries in semiconductors : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
5
Pub. Year:
1982
Page(from):
199
Page(to):
204
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444006974 [0444006974]
Language:
English
Call no.:
M23500/5
Type:
Conference Proceedings

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