Content-based image retrieval for semiconductor manufacturing
- Author(s):
- Karnowski,T.P. ( Oak Ridge National Lab )
- Tobin,K.W.,Jr.
- Ferrell,R.K.
- Lakhani,F.
- Publication title:
- Machine vision applications in industrial inspection VIII : 24-26 January 2000, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3966
- Pub. Year:
- 2000
- Page(from):
- 162
- Page(to):
- 172
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435842 [0819435848]
- Language:
- English
- Call no.:
- P63600/3966
- Type:
- Conference Proceedings
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