Smooth and anisotropic ion beam etching of InP with Ar/H2 chemistry

Smooth and anisotropic ion beam etching of InP with Ar/H2 chemistry

Author(s):

Cakmak,B. ( Univ.of Bristol )
Yu,S.
Penty,R.V.
White,I.H.

Publication title:

Integrated optics devices iv : 24-25 January, 2000, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3936

Pub. Year:

2000

Page(from):

139

Page(to):

146

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819435538 [0819435538]

Language:

English

Call no.:

P63600/3936

Type:

Conference Proceedings

Details

TDL ID:	ZA00019026
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Integrated optics devices
Conf. info. (Number):	2000 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2000.01.24-2000.01.25

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