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Polysilicon xylophone bar magnetometers

Author(s):
Wickenden,D.K. ( Johns Hopkins Univ )
Champion,J.L.
Givens,R.B.
Kistenmacher,T.J.
Lamb,J.L.
Oslander,R.
1 more
Publication title:
Micromachined Devices and Components V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3876
Pub. Year:
1999
Page(from):
267
Page(to):
273
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434739 [0819434736]
Language:
English
Call no.:
P63600/3876
Type:
Conference Proceedings

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