Parallel-plate electrostatic dual-mass resonator
- Author(s):
- Dyck,C.W. ( Sandia National Labs. )
- Allen,J.J.
- Huber,R.J.
- Publication title:
- Micromachined Devices and Components V
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3876
- Pub. Year:
- 1999
- Page(from):
- 198
- Page(to):
- 209
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434739 [0819434736]
- Language:
- English
- Call no.:
- P63600/3876
- Type:
- Conference Proceedings
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