Static and dynamic characterization of polysilicon surface-micromachined actuators
- Author(s):
- Laible,V. ( Technical Univ.of Berlin )
- Hagelin,P.M.
- Solgaard,O.
- Obermeier,E.
- Publication title:
- Micromachined Devices and Components V
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3876
- Pub. Year:
- 1999
- Page(from):
- 162
- Page(to):
- 170
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434739 [0819434736]
- Language:
- English
- Call no.:
- P63600/3876
- Type:
- Conference Proceedings
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