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Development of silicon accelerometers using epi-micromachining

Author(s):
Publication title:
Micromachined Devices and Components V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3876
Pub. Year:
1999
Page(from):
84
Page(to):
92
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434739 [0819434736]
Language:
English
Call no.:
P63600/3876
Type:
Conference Proceedings

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