Single-crystal silicon gyroscope with decoupled drive and sense

Single-crystal silicon gyroscope with decoupled drive and sense

Author(s):

Adams,S.G. ( Kionix Inc )

Publication title:

Micromachined Devices and Components V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3876

Pub. Year:

1999

Page(from):

74

Page(to):

83

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434739 [0819434736]

Language:

English

Call no.:

P63600/3876

Type:

Conference Proceedings

Details

TDL ID:	ZA00019020
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachned Devices and Components
Conf. info. (Number):	1999 : 5th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.09.20-1999.09.21

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