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High-repetition-rate excimer lasers for DUV Lithography

Author(s):
Stamm,U. ( Lambda Physik GmbH )
Paetzel,R.
Bragin,I.
Berger,V.
Klaft,I.
Kleinschmidt,J.
Osmanov,R.
Schroeder,T.
Vogler,K.
Zschocke,W.
Basting,D.
6 more
Publication title:
Optical microlithography XII : 17-19 March 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3679
Pub. Year:
1999
Vol.:
Part2
Page(from):
1050
Page(to):
1057
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431530 [0819431532]
Language:
English
Call no.:
P63600/3679
Type:
Conference Proceedings

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