Blank Cover Image

Challenge to 0.13-ヲフm device patterning using KrF

Author(s):
Kim,I.-S. ( Samsung Electronlcs Co Ltd. )
Lee,J.-H.
Cha,D.-H.
Park,J.-S.
Cho,H.-K.
Moon,J.-T.
1 more
Publication title:
Optical microlithography XII : 17-19 March 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3679
Pub. Year:
1999
Vol.:
Part2
Page(from):
872
Page(to):
881
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431530 [0819431532]
Language:
English
Call no.:
P63600/3679
Type:
Conference Proceedings

Similar Items:

Kim,S.-K., Kim,Y.-S., Kim,J.-S., Bok,C.-K., Ham,Y.-M., Baik,K.-H.

SPIE - The International Society for Optical Engineering

Yim,D., Kim,H.-S., Baik,K.-H.

SPIE-The International Society for Optical Engineering

Cha,D.-H., Kye,J.-W., Seong,N.-G., Kang,H.-Y., Cho,H.-K., Moon,J.-T.

SPIE-The International Society for Optical Engineering

Sohn,J.M., Choi,S.W., Kim,B.G., Cho,H.K., Yoon,H.S.

SPIE-The International Society for Optical Engineering

Kim,J.H., Moon,S.C., Ko,B.S., Park,J.H., Lee,T.G., Shin,K.S., Kim,D.H.

SPIE-The International Society for Optical Engineering

Arai,T., Sakamizu,T., Kasuya,K., Katoh,K., Soga,T., Saitoh,H., Shiraishi,H., Hoga,M.

SPIE - The International Society for Optical Engineering

Lee,I.-H., Nam,K.-H., Kim,H.-S.

SPIE - The International Society for Optical Engineering

Yim,D., Lim,C.-M., Kim,H.-S., Baik,K.-H.

SPIE-The International Society for Optical Engineering

Park,C.-H., Rhie,S.-U., Choi,J.-H., Park,J.-S., Seo,H.-W., Kim,Y.-H., Park,Y.-K., Han,W.-S., Lee,W.-S., Kong,J.-T.

SPIE - The International Society for Optical Engineering

Park,J.-S., Kim,D.-H., Park,C.-H., Kim,Y.-H., Yoo,M.-H., Kong,J.-T., Kim,H.-W., Yoo,S.-I.

SPIE-The International Society for Optical Engineering

Chen,Y.T., Lin,C.H., Lin,H.T., Hsieh,H.C., Yu,S.S., Yen,A.

SPIE - The International Society for Optical Engineering

Kim,I.-S., Kim,B.-S., Lee,J.-H., Cho,H.-K., Moon,J.-T.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12