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Preliminary results at the ultradeep x-ray lithography beamline at CAMD

Author(s):
Aigeldinger,G. ( Louisiana State Univ.(USA)and Univ.Freiburg )
Coane,P.J.
Craft,B.C.
Goettert,J.
Ledger,S.
Ling,Z.G.
Manohara,H.M.
Rupp,L.
3 more
Publication title:
Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4019
Pub. Year:
2000
Page(from):
429
Page(to):
435
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436450 [0819436453]
Language:
English
Call no.:
P63600/4019
Type:
Conference Proceedings

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