Silicon micro-electro-mechanical systems for millimeter-wave applications

Silicon micro-electro-mechanical systems for millimeter-wave applications

Author(s):

Grenier,K. ( Lab.d'Analyse et d'Architecture des Systemes )
Pons,P.
Parra,T.
Plana,R.
Graffeuil,J.

Publication title:

Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4019

Pub. Year:

2000

Page(from):

354

Page(to):

361

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436450 [0819436453]

Language:

English

Call no.:

P63600/4019

Type:

Conference Proceedings

Details

TDL ID:	ZA00018977
Series ID:	PA00000029
Conf. info. (Name):	Design, Test,Integration, and Packaging of MEMS/MOEM
Conf. info. (Number):	2000
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	2000.05.09-2000.05.11

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