Negative-tone resist for phase-shifting mask technology:a progress report
- Author(s):
Richter,E. ( Infineon Technologies AG(Germany)and Univ.of Regensburg ) Elian,K. Hien,S. Kuhn,E. Sebald,M. Shirai,M. - Publication title:
- Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3999
- Pub. Year:
- 2000
- Vol.:
- Part1
- Page(from):
- 91
- Page(to):
- 101
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436177 [0819436178]
- Language:
- English
- Call no.:
- P63600/3999
- Type:
- Conference Proceedings
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