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A new purged UV spectroscopic ellipsometer to characterize 157 nm nanolithographic materials

Author(s):
Publication title:
Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
584
Pub. Year:
2000
Page(from):
177
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994928 [1558994920]
Language:
English
Call no.:
M23500/584
Type:
Conference Proceedings

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