*Resist materials providing small line-edge roughness
- Author(s):
- Publication title:
- Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 584
- Pub. Year:
- 2000
- Page(from):
- 135
- Pub. info.:
- Warrendale, Pa.: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994928 [1558994920]
- Language:
- English
- Call no.:
- M23500/584
- Type:
- Conference Proceedings
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