KINETICS OF SURFACE ROUGHENING AND SMOOTHING DURING ION SPUTTERING

KINETICS OF SURFACE ROUGHENING AND SMOOTHING DURING ION SPUTTERING

Author(s):

Publication title:

Mechanisms of thin film evolution

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

317

Pub. Year:

1994

Page(from):

91

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992160 [1558992162]

Language:

English

Call no.:

M23500/317

Type:

Conference Proceedings

Details

TDL ID:	ZA00018924
Series ID:	PA00000011
Conf. info. (Name):	Symposium on mechanisms of thin film evolution
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	1993.11.29-1993.12.03

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