Doping Influence on TiSi2 C49-C54 Conversion Kinetics by Micro-Raman Spectroscopy

Doping Influence on TiSi2 C49-C54 Conversion Kinetics by Micro-Raman Spectroscopy

Author(s):

Publication title:

Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

514

Pub. Year:

1998

Page(from):

387

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994201 [1558994203]

Language:

English

Call no.:

M23500/514

Type:

Conference Proceedings

Details

TDL ID:	ZA00018917
Series ID:	PA00000011
Conf. info. (Name):	Symposium on advanced interconnects and contact materials and processes for future integrated circuits
Conf. info. (Number):	1998
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1998.04.13-1998.04.16

Similar Items:

1 Conference Proceedings Kinetics of the C49-C54 Transformation in Patterned and Blanket TiSi2 Films: A Comparison Via, F. La, Privitera, S., Grimaldi, M. G., Raineri, V., Galli, M., Marabelli, F., Iannuzzi, M., Miglio, L. MRS - Materials Research Society	7 Conference Proceedings IN SITU STRESS MEASUREMENTS DURING THE FORMATION OF TiSi2 C49 ON Si WAFERS Jongste, J. F., Janssen, G. C. A. M., Radelaar, S. Materials Research Society
2 Conference Proceedings Structure, Morphology, and Kinetics of the C49 to C54 Phase Transformation in TiSi2 Thin Films Bocelli, S., Marabelli, F., Iannuzzi, M., Miglio, L., Grimaldi, M. G., LaVia, F. MRS - Materials Research Society	8 Conference Proceedings Kinetics of the C49 to C54 Phase Transformation in TiSi2 Thin Films on Deep-Sub-Micron Lines Kittl, J. A., Prinslow, D. A., Apte, P. P., Pas, M. F. MRS - Materials Research Society
3 Conference Proceedings Investigation On C54 Nucleation And Growth By Micro-Raman Imaging Privitera, Stefania M. S., Meinardi, Francesco, Quilici, Simona, La Via, Francesco, Spinella, Corrado, Grimaldi, Maria … Materials Research Society	9 Conference Proceedings Effects of Ion Metal Plasma (IMP) Titanium Deposition on Ti Silicide Formation Sabbadini, A., Cazzaniga, F., Brambilla, M., Bresolin, C., Cusi, V., Marangon, T., Queirolo, G. MRS - Materials Research Society
4 Conference Proceedings Investigation of metal contamination by photocurrent measurements:validation and application to ion implantation processes Polignano,M.L., Bresolin,C., Cazzaniga,F., Sabbadini,A., Queirolo,G. SPIE-The International Society for Optical Engineering	10 Conference Proceedings In Situ TEM Analysis of TiSi2 C49-C54 Transformations During Annealing Gignac, L. M., Svilan, V., Clevenger, L. A., Cabral, C., Jr., Lavoie, C. MRS - Materials Research Society
5 Conference Proceedings A Kinetic Study of the C49 to C54 Conversion in TiSi2 Using Electrical Resistivity Measurements on Single Sub-Micron Lines Saenger, K. L., Cabral, C., Jr, Clevenger, L. A., Roy, R. A. MRS - Materials Research Society	11 Conference Proceedings Estimation of the critical radius for the nucleation of the C54 phase in C49 TiSi2: Role of the difference in density Migas, D. B., Iannuzzi, M., Miglio, Leo, Via, F. La, Grimaldi, M. G. MRS-Materials Research Society
6 Conference Proceedings Effect of a Thin Ta Layer on the C49-C54 Transition La Via, Francesco, Mammoliti, Francesco, Grimaldi, Maria Grazia, Quilici, Simona, Meinardi, Franco Materials Research Society	12 Conference Proceedings Reduction of the C54-TiSi2 Phase Formation Temperature Using Metallic Impurities Mann, R. W., Clevenger, L. A., Miles, G. L., Harper, J. M. E., Cabral, C., Jr, d'Heurle, F. M., Knotts, T. A., Rakowski, … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12