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Extendibility of Cu Damascene to 0.1 ヲフm Wide Interconnections

Author(s):
Hu, C-K.
Lee, K. Y.
Gignac, L.
Rossnagel, S. M.
Uzoh, C.
Chan, K.
Roper, P.
Harper, J. M. E.
3 more
Publication title:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
514
Pub. Year:
1998
Page(from):
287
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994201 [1558994203]
Language:
English
Call no.:
M23500/514
Type:
Conference Proceedings

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