Improving the Thermal Stability of Photoresist Films by Ion-Beam Irradiation
- Author(s):
Zawislak, F. C. Garcia, Irene T. S. Samios, D. Baptista, D. L. Fichtner, P. F. P. Alves, E. Silva, Maria F. da Soares, J. C. - Publication title:
- Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 504
- Pub. Year:
- 1999
- Page(from):
- 443
- Pub. info.:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994096 [1558994092]
- Language:
- English
- Call no.:
- M23500/504
- Type:
- Conference Proceedings
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