Substrate-Surface Effect on Initial Growth Process of Microcrystalline Silicon Films

Substrate-Surface Effect on Initial Growth Process of Microcrystalline Silicon Films

Author(s):

Ikuta, K.

Publication title:

Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

452

Pub. Year:

1997

Page(from):

743

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993563 [1558993568]

Language:

English

Call no.:

M23500/452

Type:

Conference Proceedings

Details

TDL ID:	ZA00018911
Series ID:	PA00000011
Conf. info. (Name):	Symposium on advances in microcrystalline and nanocrystalline semiconductors
Conf. info. (Number):	1996
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1996.12.02-1996.12.06

Similar Items:

1 Conference Proceedings STM Observation on the Initial Growth of Amorphous and Microcrystalline Silicon Films Ikuta, K., Toyoshima, Y., Yamasaki, S., Matsuda, A., Tanaka, K. MRS - Materials Research Society	7 Conference Proceedings Effect of In Situ H2 Plasma Pretreatment on the Low Temeprature Microcrystalline (μc-Si:H) Silicon Film Deposited on Amorphous Si02 and SiNx:H Surfaces Park, Y.-B., Rhee, S.-W. Electrochemical Society
2 Conference Proceedings Nucleation Processes in Si CVD on Ultrathin SiO2 Layers Yasuda, T., Hwang, D. S., Ikuta, K., Yamasaki, S., Tanaka, K. MRS - Materials Research Society	8 Conference Proceedings MOCVD Growth of GaN Films on Lattice-Matched Oxide Substrates Kryliouk, O. M., Dann, T. W., Anderson, T. J., Maruska, H. P., Zhu, L. D., Daly, J. T., Lin, M., Norris, P., Chai, H. … MRS - Materials Research Society
3 Conference Proceedings Fast In-Diffusion Of Hydrogen At The Initial Stage Of Hydrogen Plasma Treatment On a-Si:H Films Observed By In-Situ ESR Measurements Das, U. K., Yamasaki, S., Yasuda, T. Materials Research Society	9 Conference Proceedings The Effect of Buffer Layers in MOCVD Growth of GaN Film on 3C-SiC/Si Substrate Park, C. I., Kang, J. H., Kim, K. C., Lim, K. Y., Suh, E.-K., Nahm, K. S. Materials Research Society
4 Conference Proceedings Probing the Elementary Surface Reactions of Hydrogenated Silicon PECVD by In Situ ESR Yamasaki, S., Malten, C., Umeda, T., Isoya, J-I., Tanaka, K. MRS - Materials Research Society	10 Conference Proceedings GROWTH OF CRYSTALLINE SILICON, MICROCRYSTALLINE AND EPITAXIAL AT LOW SUBSTRATE TEMPERATURE Tanabe, H., Azuma, A., Uematsu, T., Shirai, H., Hanna, J., Shimizu, I. Materials Research Society
5 Conference Proceedings Growth of Hexagonal Gallium Nitride Films on the (111) Surfaces of Silicon with Zinc Oxide Buffer Layers Kim, Y., Kim, C. G., Lee, K-W., Yu, K-S., Park, J. T. MRS - Materials Research Society	11 Conference Proceedings Characterization of Nitrogen Species for P-Type Doping of Znse Kimura, K., Kajiyama, H., Miwa, S., Yasuda, T., Kuo, L. H., Jin, C. G., Tanaka, K., Yao, T. MRS - Materials Research Society
6 Conference Proceedings Improvement of Grain Growth and Surface Roughness in Laser-Crystallized Polycrystalline Silicon Films Choi, H-S., Park, C-M., Jeon, J-H., Min, B-H., Han, M-K. MRS - Materials Research Society	12 Conference Proceedings EFFECT OF HOT WATER EXPOSURE ON BARE SILICON SURFACES IN MOS PROCESSING Eisenberg, J. H., Shive, S. F., Stevie, F., Higashi, G. S., Boone, T., Hanson, K., Sapjeta, J. B., DiBello, G. N., … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12