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Preparation of Microcrystalline Silicon with the Layer-by-Layer Technique at Various Plasma Excitation Frequencies

Author(s):
Hapke, P.
Carius, R.
Finger, F.
Lambertz, A.
Vetterl, O.
Wagner, H.
1 more
Publication title:
Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
452
Pub. Year:
1997
Page(from):
737
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993563 [1558993568]
Language:
English
Call no.:
M23500/452
Type:
Conference Proceedings

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