Preparation of PZT Thin Films on Pt/Ti/SiO2 and Pt/SiO2 Substrates by ECR Plasma-Enhanced dc Magnetron Multitarget Reactive Sputtering

Preparation of PZT Thin Films on Pt/Ti/SiO2 and Pt/SiO2 Substrates by ECR Plasma-Enhanced dc Magnetron Multitarget Reactive Sputtering

Author(s):

Publication title:

Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

441

Pub. Year:

1997

Page(from):

205

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993457 [1558993452]

Language:

English

Call no.:

M23500/441

Type:

Conference Proceedings

Details

TDL ID:	ZA00018910
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thin films
Conf. info. (Number):	1996
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1996.12.02-1996.12.06

Similar Items:

1 Conference Proceedings The Effects of the Addition of CF4, Cl2, and N2 to O2 ECR Plasma on the Etch Rate, Selectivity, and Etched Profile of RuO2 Film Lee, Eung-Jik, Kim, Jong-Sam, Kim, Jin-Woong, Baik, Ki-Ho, Lee, Won-Jong MRS - Materials Research Society	7 Conference Proceedings Preparation and Characterization of PZT Thin Films on RuOx/Pt Multilayered Electrode by MOCVD Kim, Tae-Young, Kim, Daesig, Chung, Chee Won, Lee, June Key, Song, Inyong MRS - Materials Research Society
2 Conference Proceedings (100) Oriented Platinum Thin Films Deposited by dc Magnetron Sputtering on SiO2/Si Substrates Park, Dong-Yeon, Lee, Dong-Su, Kim, Min Hong, Park, Tae-Soon, Woo, Hyun-Jung, Yoon, Euijoon, Chun, Dong-Il, Ha, Jowoong MRS - Materials Research Society	8 Conference Proceedings Optical Study of SiO2/Nanocrystalline-Si Multilayers Using Ellipsometry Lee, Kang-Joo, Kang, Tae-Dong, Lee, Hosun, Hong, Seung Hui, Choi, Suk-Ho, Kim, Kyung Joong, Moon, Dae Won Materials Research Society
3 Conference Proceedings Fabrication and Evaluation of 3-D Packages With Through Hole Via Dong Min Jang, Kwang Yong Lee, Chung Hyun Ryu, Byeong Hoon Cho, Tae Sung Oh, Joung Ho Kim, Won Jong Lee, Jin Yu Materials Research Society	9 Conference Proceedings Microstructural Characterization of Pt/Ti and RuO2 Electrodes on SiO2/Si Annealed in the Oxygen Ambient Lee, Jeong Soo, Kwon, Hyun Ja, Jeong, Young Woo, Kim, Hyun Ha, Park, Kyu Ho, Kim, Cha Yeon MRS - Materials Research Society
4 Conference Proceedings Characteristics of Inter Poly Dielectric (IPD) Prepared by Plasma Oxidation Treatment of LP-CVD SiO₂ Film Jung-hwan Kim, Yong-Seok Kim, Byong-Hyun Jang, Hyun Namkoong, Woo-Sung Lee, Hun-Hyoung Leam, Seok-Woo Nam, Chang-Jin … Materials Research Society	10 Technical Paper An Experimental Comparison Between Air-Assisted Injection System and High Pressure Injection System at 2-Stroke Engine Yoon,Kum-Jung, Kim,Won-Tae, Shim,Hyun-Sung, Moon,Guee-Won Society of Automotive Engineering, Inc.
5 Conference Proceedings Formation of Luminescent Si Nanocrystals by High-Temperature Annealing of Ion-Beam-Sputtered Si/SiO2 Multilayers Choi, Suk-Ho, Bae, Jun Sung, Kim, Kyung Jung, Moon, Dae Won Materials Research Society	11 Conference Proceedings Excimer Laser Crystallization of Sputter Deposited a-Si Films on Flexible Substrates Kim, Yong Hoon, Park, Sung Kyu, Moon, Dae Gyu, Kim, Won Keun, Han, Jeong In Materials Research Society
6 Conference Proceedings (447f) Performance Evaluation of Silica-PEI Adsorbents in a Two-Bubbling-Bed CO2 Capture System Young Cheol Park, Jong-Ho Moon, Hyunuk Kim, Seung-Yong Lee, Sung-Ho Jo American Institute of Chemical Engineers	12 Conference Proceedings Finite Element Based Plastic Loads for Elbows With Local Wall Thinning Jong-Hyun Kim, Chang-Sik Oh, Joong-Hyuk Ahn, Yun Jae Kim, Chi-Yong Park, Sung-Ho Lee, Tae-Ryong Kim American Society of Mechanical Engineers

1

2

3

4

5

6

7

8

9

10

11

12