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Effects of Addition of Heavy Rare-Earth Elements on the Structures and Resistivities of Al Thin Films for TFT-LCD Interconnects

Author(s):
Publication title:
Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
441
Pub. Year:
1997
Page(from):
107
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993457 [1558993452]
Language:
English
Call no.:
M23500/441
Type:
Conference Proceedings

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