Synthesis and Oxidation Kinetics of Sol-Gel and Sputtered Tantalum Nitride Thin Films
- Author(s):
- Publication title:
- Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 410
- Pub. Year:
- 1996
- Page(from):
- 295
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993136 [1558993134]
- Language:
- English
- Call no.:
- M23500/410
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
Materials Research Society |
2
Conference Proceedings
TRIBOMECHANICAL PROPERTIES OF ION-BEAM-DENSIFIED SOL-GEL ZIRCONIA THIN FILMS ON CUBIC ZIRCONIA
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
9
Conference Proceedings
Electrochromic properties of nickel oxide thin films prepared by the sol-gel method
Society of Photo-optical Instrumentation Engineers |
Materials Research Society |
MRS - Materials Research Society |
5
Conference Proceedings
Optical and electrochemical properties of sol-gel-deposited tantalum pentoxide thin films
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Effect of precursor Sol aging on Sol-Gel derived ruthenium oxide thin films
MRS-Materials Research Society |
Materials Research Society |
Electrochemical Society |