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DEPOSITION PARAMETERS FOR SPUTTER-DEPOSITED THIN FILM TiNi

Author(s):
Jardine, A. Peter  
Publication title:
Materials for smart systems : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
360
Pub. Year:
1995
Page(from):
293
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992610 [1558992618]
Language:
English
Call no.:
M23500/360
Type:
Conference Proceedings

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