Blank Cover Image

ENHANCED ADHESION OF COPPER FILMS TO SiO2, PSG AND BPSG BY REFRACTORY METAL ADDITIONS

Author(s):
Rafalski, S. A.
Spreitzer, R. L.
Russell, S. W.
Alford, T. L.
Li, J.
Moinpour, M.
Moghadam, F.
Mayer, J. W.
3 more
Publication title:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
337
Pub. Year:
1994
Page(from):
613
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992375 [1558992375]
Language:
English
Call no.:
M23500/337
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings INTERFACIAL REACTIONS OF COPPER / REFRACTORY ALLOY AND BILAYER FILMS ON SiO2

Spreitzer, R. L., Rafalski, S. A., Adams, D., Russell, S. W., Atzmon, Z., Li, J., Alford, T. L., Mayer, J. W.

MRS - Materials Research Society
7 Conference Proceedings AFM STUDIES OF SURFACE ROUGHNESS OF BOROPHOSPHOSILICATE GLASS (BPSG) FILMS AND THEIR IMPACT ON DEFECT DETECTION CAPABILITY FOR SUB MICRON VLSI TECHNOLOGY

Rojhantalab, H., Moinpour, M., Peter, N., Dass, M.L.A., Hough, W., Natter, R., Moghadam, F.

Materials Research Society
2 Conference Proceedings EFFECTIVENESS OF NITRIDE DIFFUSION BARRIERS IN A SELF-ENCAPSULATED COPPER-BASED METALLIZATION

Adams, D., Spreitzer, R. L., Russell, S. W., Theodore, N. D., Alford, T. L., Mayer, J. W.

MRS - Materials Research Society
8 Conference Proceedings Copper-Based Metallization

Li J., Hong S., Russell W. S., Mayer W. J.

Kluwer Academic Publishers
3 Conference Proceedings Indluence of Interfacial Copper on the Ti-SiO2 Reaction during Nitridatin of Cu-Ti Films

Adams, Daniel, Alford, T. L., Theodore, N. D., Laursen, T., Russell, S. W., Kim, M. J.

MRS - Materials Research Society
9 Conference Proceedings Low Temperature Oxidation of Silicon after Copper Ion Implantation

Jaquez, E. J., Alford, T. L., Theodore, N. D., Adams, D., Li, Jian, Russell, S. W., Anders, Simone

MRS - Materials Research Society
4 Conference Proceedings PARTICLE MONITORING IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION BPSG FILMS

Li, J., Moinpour, M., Fardi, B., Lee, J., Thach, D., Lawrence, M., Dass, A., Moghadam, F.

Electrochemical Society
10 Conference Proceedings INVESTIGATION OF CHROMIUM NITRIDATION USING ION BEAM RESONANCE ANALYSIS

Russell, S. W., Bair, A. E., Rack, M. J., Adams, D., Spreitzer, R. L., Alford, T. L., Culbertson, R. J.

MRS - Materials Research Society
5 Conference Proceedings IMPLICATIONS OF SURFACE CONTAMINANTS IN A BPSG DEPOSITION AND REFLOW PROCESS

Moinpour, M., Leitch, R., Li, J., Thach, D., Moghadam, F.

MRS - Materials Research Society
11 Conference Proceedings Enhanced [111] Preferred Orientation of Ag Thin Film on Amorphous SiO2 by Cu Addition

Yeongseok Zoo, Hauk Han, Terry L. Alford

Materials Research Society
6 Conference Proceedings TEOS/Ozone APCVD Thin SiO2 Sub 0.5 mm LDD Spacer Applications

Moinpour, M., Lu, W.-J., Sadjadi, R., Li, J., Moghadam, F., Wada, O., Watt, V.H.C.

Electrochemical Society
12 Conference Proceedings The Formation of TiN-Encapsulated Silver Films by Nitridation of Silver-Refractory Metal Alloys in NH3

Adams, Daniel, Alford, T. L., Laursen, T., Deng, F., Morton, R., Lau, S. S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12