Critical issues for the application of integrated MEMS/CMOS technologies to inertial measurement units
- Author(s):
- Smith,J.H. ( Sandia National Labs. )
- Montague,S.
- Allen,J.J.
- Ellis,J.R.
- Burgett,S.M.
- Publication title:
- Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3046
- Pub. Year:
- 1997
- Page(from):
- 242
- Page(to):
- 247
- Pub. info.:
- Bellingham: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424594 [0819424595]
- Language:
- English
- Call no.:
- P63600/3046
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Development of a compact optical MEMS scanner with integrated VCSEL Light source and diffractive optics
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
3
Conference Proceedings
Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators
SPIE-The International Society for Optical Engineering |
Society of Automotive Engineers |
4
Conference Proceedings
Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Target detection in desert backgrounds: infrared hyperspectral measurements and analysis
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
27 Materials Issues of Ni Fully Silicided (FUSI) Gates for CMOS Applications
Electrochemical Society |