MCP-based x-ray collimators for lithography of semiconductor devices
- Author(s):
Brunton,A.N. ( Univ.of Leicester ) Lees,J.E. Fraser,G.W. Tremsin,A.S. Feller,W.B. White,P.L. - Publication title:
- Multilayer and grazing incidence X-ray/EUV optics III : 5-6 August, 1996, Denver, Colorado
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2805
- Pub. Year:
- 1996
- Page(from):
- 212
- Page(to):
- 221
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421937 [0819421936]
- Language:
- English
- Call no.:
- P63600/2805
- Type:
- Conference Proceedings
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