Blank Cover Image

Debrisless laser-produced x-ray source with a gas puff target

Author(s):
Publication title:
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2723
Pub. Year:
1996
Page(from):
310
Page(to):
316
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420992 [0819420999]
Language:
English
Call no.:
P63600/2723
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characterization and optimization of a laser-produced x-ray source with a double-stream gas puff target

Fiedorowicz,H., Bartnik,A., Jarocki,R., Kostecki,J., Krzywinski,J., Rakowski,R., Szczurek,M.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Characterization of a laser-produced x-ray source with a double-stream gas puff target for x-ray and EUV lithography

Fiedorowicz,H., Bartnik,A., Daido,H., Jarocki,R., Rakowski,R., Suzuki,M., Szczurek,M., Yamagami,S.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Investigations of X-Ray Emission from a Laser-Irradiated Gas Puff Target,

Fiedorowicz,H., Bartnik,A., Jarocki,R., Kostecki,J., Szczurek,M.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Characterization and optimization of a laser-produced x-ray source with a gas puff target

Fiedorowicz,H., Bartnik,A., Jarocki,R., Rakowski,R., Szczurek,M., Daido,H., Sakaya,N., Suzuki,M., Nagatomo,H., Tang,H., …

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies

Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Rakowski, R., Szczurek, M.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Compact and debris-free laser plasma soft x-ray source based on a gas puff target [5918-18]

Fedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Krzywinski, J., Rakowski, R., Szczurek, M.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Formation of elongated laser sparks in gas puff targets by nanosecond laser pulses

Bartnik,A., Fiedorowicz,H., Kostecki,J., Morozov,A., Suckewer,S., Szczurek,M.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Spectral measurement of soft x-ray and EUV emissions from a laser-irradiated gas puff target using a transmission grating spectrometer

Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Krzywinski, J., Mikolajczyk, J., Rakowski, R., Szczurek, M., …

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Wide band laser-plasma soft x-ray source using a gas puff target for direct photo-etching of polymers [5958-44]

Bartnik, A., Fiedorowicz, H., Jarocki, R., Kostecki, J., Rakowski, R., Szczurek, M.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Generation of laser plasma resulting from interaction of a nanosecond laser pulse with a gas puff target

Fiedorowicz,H., Bartnik,A., Glazyrin,I.V., Diyankov,O., Jarocki,R., Krasnogorov,I., Koshelev,S., Kostecki,J., …

SPIE - The International Society for Optical Engineering
6 Conference Proceedings Compact laser plasma EUV source based on a gas puff target for metrology

Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Mikolajczyk, J., Rakowski, R., Szczurek, M.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings X-ray laser experiments using laser-irradiated gas puff targets at the ASTERIX IV facility

H. Fiedorowicz, A. Bartnik, M. Szczurek, E.E. Fill, Y. Li

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12