Laser crystallization of a-Si:H/a-SiNx:H multilayers

Laser crystallization of a-Si:H/a-SiNx:H multilayers

Author(s):

Huang,X.G. ( Zhongshan Univ. )
Lee,W.K.
Liu,D.
Yu,Z.X.

Publication title:

Lasers as tools for manufacturing of durable goods and microelectronics : 19 January-2 February, 1996, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2703

Pub. Year:

1996

Vol.:

PartA

Page(from):

375

Page(to):

379

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420770 [0819420778]

Language:

English

Call no.:

P63600/2703

Type:

Conference Proceedings

Details

TDL ID:	ZA00018866
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Conf. info. (Number):	1996
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1996.01.29-1996.02.02

Similar Items:

1 Conference Proceedings AFM And HREM Observation Of The Pulse Laser Interference Crystallized a-Si:H/a-SiNx:H Multilayers Chen, K., Fung, Y. M., Huang, X., Li, J., Li, Q., Li, W., Liu, Z., Wang, L., Wang, M., Xu, J., Xu, J. B., Yin, X., Zhu, … Materials Research Society	7 Conference Proceedings Fabrication and Characterization of a-SiNx:H Alloys by PECVD Using N2 and SiH4 Kizzar, S.G., Naseem, H.A., Brown, W.D. Electrochemical Society
2 Conference Proceedings Kerr lens mode-locking of solid state lasers with thermal lensing Huang,X.G., Lee,W.K., Huang,F.R., Yu,Z.X. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Structural characterization and Coulomb blockade of a-SiNx/ nanocrystalline Si /a-SiNx asymmetric double-barrier structures Wu, L. C., Dai, M., Huang, X. F., Han, P. G., Yu, L. W., Zou, H. C., Li, W., Chen, K. J. Materials Research Society
3 Conference Proceedings TRANSMISSION ELECTRON MICROSCOPY OBSERVATION OF CONSTRAINED CRYSTALLIZATION IN a-Si:H/a-SiNx:H MULTILAYER FILM Huang, Xinfan, Shi, Weihua, Chen, Kunji, Yu, Shidong, Feng, Duan MRS - Materials Research Society	9 Conference Proceedings Effects of Temperature on the Crystallization of Calcium Carbonate in Egg White Protein Solution System W.K. Zhu, X.G. Luo, X.Y. Lin, J. Zhou, Y. Lu Trans Tech Publications
4 Conference Proceedings Stable Oproperties of Ti:sapphire laser X.G. Huang, W.-K. Lee, S.P. Wong, S.Y. Zhang, Z.X. Yu Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings The Constrained Growth and Patterned Distribution of nc-Si from a-SiNx/a-Si:H/a-SiNx: Mechanism and Experiments Chen, K. J., Chen, K., Wu, L. C., Ma, Z. Y., Han, P. G., Li, W., Zhang, L., Zhang, Y. J., Huang, X. F. Materials Research Society
5 Conference Proceedings Visible electroluminescence from pulsed-laser-annealed a-Si:H/a-SiNx:H superlattices on silicon wafer Wang,M., Huang,X., Li,W., Xu,J., Chen,K., Wang,Q. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Effects of Ca²⁺ Concentration on Calcium Carbonate Crystallization in Lignin Solution System W.K. Zhu, X.G. Luo, X.Y. Lin, P. He Trans Tech Publications
6 Conference Proceedings Visible photo-and electro-luminescence from laser-crystallized a-Si:H and its based multilayers Chen,K., Wu,W., Huang,X., Li,Z., Wang,M., Xu,J., Li,W., Feng,D. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Pulsed Laser Deposition and Acoustic Property of Piezoelectric/Nonpiezoelectric Multilayer Films Hu, W. S., Liu, Z. G., Chen, Y-F., Yu, T., Zhao, H. W., Hu, X. B., Liu, X., Wu, R. X. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12