Chemical-free cleaning using excimer lasers

Chemical-free cleaning using excimer lasers

Author(s):

Lizotte,T.E. ( Neuman Micro Technologies,Inc. )
O'Keeffe,T.R.

Publication title:

Lasers as tools for manufacturing of durable goods and microelectronics : 19 January-2 February, 1996, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2703

Pub. Year:

1996

Vol.:

PartA

Page(from):

279

Page(to):

287

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420770 [0819420778]

Language:

English

Call no.:

P63600/2703

Type:

Conference Proceedings

Details

TDL ID:	ZA00018866
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Conf. info. (Number):	1996
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1996.01.29-1996.02.02

Similar Items:

1 Conference Proceedings Beam optimization for dry cleaning processes Lizotte,T.E., Ohar,O.P., Baker,T.J., O'Keeffe,T.R. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Beam shaping for laser initiated optical primers T. E. Lizotte Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Verification of dynamic disturbance torques at the spacecraft interface of the PPF K-band terminal using a six-degree-of-freedom force transducer Gielen, L., Belien, R., O'Keeffe, J. ESA Publications Division	8 Conference Proceedings *EXCIMER LASER SURFACE MODIFICATION: PROCESS AND PROPERTIES Jervis, T.R., Nastasi, M., Hirvonen, J-P. Materials Research Society
3 Conference Proceedings Forensic firearm identification of semiautomatic handguns using laser formed microstamping elements T. E. Lizotte, O. Ohar Society of Photo-optical Instrumentation Engineers	9 Conference Proceedings Crystal structures as periodic foams and vice versa O'Keeffe Michael Kluwer Academic Publishers
4 Conference Proceedings Excimer laser ablation used for the fabrication of micro-optic phase and diffraction elements Harvey,E.C., Hayes,J.P., Dempster,B.C., Mackin,T.R., Scholten,R.E. SPIE - The International Society for Optical Engineering	10 Conference Proceedings The bond valence method in crystal chemistry. O'KEEFFE Michael Kluwer Academic Publishers
5 Conference Proceedings Dual-chamber ultra line-narrowed excimer light source for 193-nm lithography Fleurov, V.B., III, D.J.C., Brown, D.J.W., O'Keeffe, P., Besaucele, H., Ershov, A.I., Trintchouk, F., Ishihara, T., … SPIE-The International Society for Optical Engineering	11 Conference Proceedings Vibration monitoring using 2D speckle pattern images Russell,P.C., O'Keeffe,G., Cosgrave,J., Jones,G.R. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Deep-UV excimer laser measurements at NIST R.W. Leonhardt, T.R. Scott Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Compensator optics to improve the stability of laser beam delivery systems that utilize beam shaping technology T. Lizotte SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12