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Scanning and rotating micromirrors using thermal actuators

Author(s):
Publication title:
Optical scanning systems: design and applications : 30-31 July, 1997, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3131
Pub. Year:
1997
Page(from):
134
Page(to):
144
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425539 [0819425532]
Language:
English
Call no.:
P63600/3131
Type:
Conference Proceedings

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