Development of a smooth-surface microroughness standard

Development of a smooth-surface microroughness standard

Author(s):

Scheer,B.W. ( VLSI Standards,Inc. )
Stover,J.C. ( ADE Optical Systems Corp. )

Publication title:

Scattering and surface roughness : 30-31 July 1997, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3141

Pub. Year:

1997

Page(from):

78

Page(to):

87

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425638 [081942563X]

Language:

English

Call no.:

P63600/3141

Type:

Conference Proceedings

Details

TDL ID:	ZA00018796
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Scattering and Surface Roughness
Conf. info. (Number):	1997
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1997.07.30-1997.07.31

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