Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics

Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics

Author(s):

Graber,T. ( Argonne National Lab. )

Krasnicki,S.F. ( Argonne National Lab. )

Fernandez,P.B. ( Argonne National Lab. )

Mills,D.M. ( Argonne National Lab. )

Tong,Q.-Y. ( Duke Univ.and Max-Planck Institute of Microstructure Physics (FRC) )

Gosele,U.M. ( Duke Univ.and Max-Planck Institute of Microstructure Physics (FRC) )

1 more

Publication title:

High heat flux and synchrotron radiation beamlines : 28-29 July 1997, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3151

Pub. Year:

1997

Page(from):

54

Page(to):

64

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425737 [0819425737]

Language:

English

Call no.:

P63600/3151

Type:

Conference Proceedings

Details

TDL ID:	ZA00018795
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : High Heat Flux and Synchrotron Radiation Beamlines
Conf. info. (Number):	1997
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1997.07.28-1997.07.29

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