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Fabrication of spatial light modulator backplanes using damascene processing

Author(s):
O'Hara,A. ( Univ.of Edinburgh (UK) )
Bodammer,G. ( Univ.of Edinburgh (UK) )
Vass,D.G. ( Univ.of Edinburgh (UK) )
McGhee,L. ( EKC Technology Ltd. (UK) )
Stevenson,J.T.M. ( Univ.of Edinburgh (UK) )
Underwood,I. ( Univ.of Edinburgh (UK) )
1 more
Publication title:
Spatial light modulators : 28-29 January 1998, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3292
Pub. Year:
1998
Page(from):
107
Page(to):
115
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427311 [0819427314]
Language:
English
Call no.:
P63600/3292
Type:
Conference Proceedings

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