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Development of advanced second-generation micromirror devices fabricated in a four-level planarized surface-micromachined polycrystalline silicon process

Author(s):
Publication title:
Spatial light modulators : 28-29 January 1998, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3292
Pub. Year:
1998
Page(from):
71
Page(to):
80
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427311 [0819427314]
Language:
English
Call no.:
P63600/3292
Type:
Conference Proceedings

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