Design and testing of polysilicon surface-micromachined piston micromirror arrays
- Author(s):
- Cowan,W.D. ( Air Force Institute of Technology )
- Bright,V.M. ( Univ.of Colorado/Boulder )
- Lee,M.K. ( Air Force Institute of Technology )
- Comtois,J.H. ( Air Force Research Lab. )
- Michalicek,M.A. ( Air Force Research Lab. )
- Publication title:
- Spatial light modulators : 28-29 January 1998, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3292
- Pub. Year:
- 1998
- Page(from):
- 60
- Page(to):
- 70
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427311 [0819427314]
- Language:
- English
- Call no.:
- P63600/3292
- Type:
- Conference Proceedings
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