Blank Cover Image

Effect of Oxidation Induced Stacking Fault (OSF) Ring on Generation and Motion of Slip Dislocation

Author(s):
Publication title:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3322
Pub. Year:
1997
Page(from):
223
Page(to):
234
Pub. info.:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427656 [0819427659]
Language:
English
Call no.:
P63600/3322
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Effect of Oxidation Induced Stacking Fault (OSF) Ring on Generation and Motion of Slip Dislocation

Gonzalez, F., Thakur, R.P.S., Bondarenko, I., Thong, Q., Rozgonyi, O.A.

Electrochemical Society
7 Conference Proceedings Investigation of the Effect of Thermal History on Ring-OSF Formation in CZ-Silicon Crystals

Kelly, G. P., Hourai, M., Umeno, S., Sano, M., Tsuya, H.

MRS - Materials Research Society
2 Conference Proceedings Thermally Induced Dislocation and Slip Defects in Silicon

Cho, C.R., Kim, Y.S., Lee, J.K., Ko, S.W., Choi, D.J., Son, C.B., Stephens, A.E., Rozgonyi, G.A.

Electrochemical Society
8 Conference Proceedings Impact of Electrodes on Gate Oxide Reliability: Examples From Isolation and Gate-Stack Processing

Chapek, D. L., Schuegraf, K. F., Thakur, R. P. S.

MRS - Materials Research Society
3 Conference Proceedings Crystal originated particles (COPs), bulk defects including the OSF ring, gate oxide integrity (GOI), and DRAM yield

Rozgonyi, G., Tamatsuka, M., Bae, K.-M., Gonzales, F.

Electrochemical Society
9 Conference Proceedings Effect of Recombination-Induced Stacking Faults on Majority Carrier Conduction and Reverse Leakage Current on 10 kV SiC DMOSFETs

S.H. Ryu, F. Husna, S.K. Haney, Q.C.J. Zhang, R.E. Stahlbush

Trans Tech Publications
4 Conference Proceedings EBIC and TEM Study of Process Induced Defects in SOI Wafers

Bondarenko,I.E., Kononchuk,O.V., Rozgonyi,G.A.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Effect of Crystal Defects Such as COPs, Large Dislocations, and OSF Ring on Device Integrity Degradation

Park, J.G., Lee, G.S., Park, J.M., Chon, S.M., Chung, H.K.

Electrochemical Society
5 Conference Proceedings EBIC and TEM Study of Process Induced Defects in SOI Wafers

Bondarenko, I.E., Kononchuk, O.V., Rozgonyi, G.A.

Electrochemical Society
11 Conference Proceedings An Investigation of Single and Dual Type 'Crystal Originated Particles'

Gonzalez, F., Rozgonyi, G.A., Gilgen, B., Barbour, R.

Electrochemical Society
6 Conference Proceedings A Vacancy/Oxygen Based Model Describing Radial Distribution of Voids, OSF-Ring, and AOP in Ring Structure of Cz Silicon Crystals

Bae, K.-M., Rozgonyi, G., Kim, J.-R., Oh, H.-S.

Electrochemical Society
12 Conference Proceedings Gettering of Fe, Cu and Ni in MeV Ion Implanted Epitaxial Silicon

Koveshnikov, S., Kononchuk, O., Beaman, K., Rozgonyi, G.A., Gonzalez, F.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12