Characterization Challenges for the ULSI Era*

Characterization Challenges for the ULSI Era*

Author(s):: Shaffner,T.J.
Publication title:: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 3322
Pub. Year:: 1997
Page(from):: 1
Page(to):: 15
Pub. info.:: Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819427656 [0819427659]
Language:: English
Call no.:: P63600/3322
Type:: Conference Proceedings

Details

TDL ID:	ZA00018778
Series ID:	PA00000029
Conf. info. (Name):	Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Conf. info. (Number):	1997
Conf. info. (Venue):	Montréal, QC, Canada
Conf. info. (Date):	1997.05.06-1997.05.08

Similar Items:

1 Conference Proceedings Characterization Challenges for the ULSI Era Shaffner, T.J. Electrochemical Society	7 Conference Proceedings Promises and challenges for free-space digital optics in switching systems beyond the year 2000 T.J. Cloonan Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Beam Characterization Techniques for ULSI Shaffner, T.J. Electrochemical Society	8 Conference Proceedings Lithography challenges of dual-damascence process in 0.13-μm era Chen,L.-J., Shiu,L.-H., Tsai,C.-S., Chang,C.-H., Kang,T.-K., Chou,S.-Y. SPIE-The International Society for Optical Engineering
3 Conference Proceedings OXYGEN STACKING FAULT PATTERNS IN CZ SILICON CRYSTAL GROWTH Shaffner, T.J. Electrochemical Society	9 Conference Proceedings Challenge of automotive sensors Giachino,J.M., Miree,T.J. SPIE-The International Society for Optical Engineering
4 Conference Proceedings INTRODUCTORY REMARKS - - DIAGNOSTIC ANALYSIS Shaffner, T.J., Kawado, S. Electrochemical Society	10 Conference Proceedings Anatomy of the slope discrepancy structure function: characterization of turbulence Brennan, T.J. SPIE-The International Society for Optical Engineering
5 Conference Proceedings A MODEL RELATING OISF PATTERNS TO CZOCHRALSKI SILICON CRYSTAL GROWTH Shaffner, T. J. American Institute of Chemical Engineers	11 Conference Proceedings CHARACTERIZATION OF ErAs/GaAs AND GaAs/ErAs/Gas STRUCTURES Zhu, Jane G., Palmstrom, Chris J., Mounier, Suzanne, Barry Carter, C. Materials Research Society
6 Conference Proceedings Materials delivery challenges in ULSI processing Loan,J.F., Sullivan,L.A., Sullivan,J.J. SPIE-The International Society for Optical Engineering	12 Conference Proceedings ERA - The processor challenge Beerthuizen, P.G. ESA Publications Division

1

2

3

4

5

6

7

8

9

10

11

12