Nitride film surface properties to reduce nitride residue
- Author(s):
- Weng,F.T. ( Taiwan Semiconductor Manufacturing Co. )
- Lee,C.-H. ( Taiwan Semiconductor Manufacturing Co. )
- Lu,K.-L. ( Taiwan Semiconductor Manufacturing Co. )
- Chyn,Y.-P. ( Taiwan Semiconductor Manufacturing Co. )
- Publication title:
- Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3332
- Pub. Year:
- 1998
- Page(from):
- 675
- Page(to):
- 685
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427779 [0819427772]
- Language:
- English
- Call no.:
- P63600/3332
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
7
Conference Proceedings
NUCLEATION AND GROWTH OF CUBIC BORON NITRIDE FILMS PRODUCED BY ION-ASSISTED PULSED LASER DEPOSITION
MRS - Materials Research Society |
2
Conference Proceedings
Effect of UV/O3 treatment on mask surface to reducing sulfuric residue ions
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Properties of boron-carbon-nitrogen ternary thin films synthesized by pulsed laser deposition
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
9
Conference Proceedings
Characterization of Carbon Nitride Films Produced by Pulsed Laser Deposition
MRS - Materials Research Society |
4
Conference Proceedings
New novel method for solving ASML alignment fail (model error) in color filter process
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Carbon nitride thin films deposited by nitrogen-ion-assisted laser ablation of graphite
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Improvement in the Extraction Efficiency of AlGaInP and GaN Thin Film LEDs Via Surface Roughening
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |