Refractive index measurements of photoresist and antireflective coatings with variable-angle spectroscopic ellipsometry

Refractive index measurements of photoresist and antireflective coatings with variable-angle spectroscopic ellipsometry

Author(s):

Synowicki,R.A. ( J. A. Woollam Co.,Inc. )
Hilfiker,J.N. ( J. A. Woollam Co.,Inc. )
Dammel,R.R. ( Clariant Corp. )
Henderson,C.L. ( Univ.of Texas at Austin )

Publication title:

Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3332

Pub. Year:

1998

Page(from):

384

Page(to):

390

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427779 [0819427772]

Language:

English

Call no.:

P63600/3332

Type:

Conference Proceedings

Details

TDL ID:	ZA00018777
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology,Inspection, and Process Control for Microlithograph
Conf. info. (Number):	1998 : 12th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.02.23-1998.02.25

Similar Items:

1 Conference Proceedings Optical characterization in the vacuum ultraviolet with variable angle spectroscopic ellipsometry:157 nm and below Hilfiker,J.N., Singh,B., Synowicki,R.A., Bungay,C.L. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Spectroscopic ellipsometry applications in photomask technology R. A. Synowicki, J. N. Hilfiker Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Spectroscopic Ellipsometry in Optical Coatings Manufacturing J.N. Hilfiker, J.S. Hale, B.D. Johs, T.E. Tiwald, R.A. Synowicki, C.L. Bungay, J.A. Woollam Society of Vacuum Coaters	8 Conference Proceedings Fluoropolyrners for 157-nm lithography:optical properties from VUV absorbance and ellipsometry measurements French,R.H., Wheland,R.C., Jones,D.J., Hilfiker,J.N., Synowicki,R.A., Zumsteg,F.C., Feldman,J., Feiring,A.E. SPIE - The International Society for Optical Engineering
3 Conference Proceedings Variable angle spectroscopic ellipsomefry in the vacuum ultraviolet Woollam,J.A., Hilfiker,J.N., Tiwald,T.E., Bungay,C.L., Synowicki,R.A., Meyer,D.E., Herzinger,C.M., Pfeiffer,G.L., … SPIE-The International Society for Optical Engineering	9 Conference Proceedings Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper) Woollam, J.A., Bungay, C.L., Yan, L., Thompson, D.W., Hilfiker, J.N. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control J.N. Hilfiker, B. Johs, J. Hale, C.M. Herzinger, T.E. Tiwald, C.L. Bungay, R.A. Synowicki, G.K. Pribil, J.A. Woollam Society of Vacuum Coaters	10 Conference Proceedings Photoresist characterization for lithography simulation:II.Exposure parameter measurements Henderson,C.L., Pancholi,S., Chowdhury,S.A., Willson,C.G., Dammel,R.R. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Spectroscopic Ellipsometry Methods for Thin Absorbing Coatings J.N. Hilfiker, R.A. Synowicki, H.G. Tompkins Society of Vacuum Coaters	11 Conference Proceedings Photoresist characterization for lithography simulation:III.Development parameter measurements Henderson,C.L., Tsiartas,P.C., Pancholi,S., Chowdhury,S.A., Dombrowski,K.D., Willson,C.G., Dammel,R.R. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Bleaching-induced changes in the dispersion curves of DNQ photoresists Henderson,C.L., Willson,C.G., Dammel,R.R., Synowicki,R.A. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Improved simulation of photoresists using new development models Dammel,R.R., Sagan,J.P., Kokinda,E., Eilbeck,N., Mack,C.A., Arthur,G.G., Henderson,C.L., Scheer,S.A., Rathsack,B.M., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12