Rapid yield learning through optical defect and electrical test analysis
- Author(s):
- Gleason,S.S. ( Oak Ridge National Lab. )
- Tobin,K.W. ( Oak Ridge National Lab. )
- Karnowski,T.P. ( Oak Ridge National Lab. )
- Lakhani,F. ( SEMATECH )
- Publication title:
- Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3332
- Pub. Year:
- 1998
- Page(from):
- 232
- Page(to):
- 242
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427779 [0819427772]
- Language:
- English
- Call no.:
- P63600/3332
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Field-test results of an image retrieval system for semiconductor yield learning
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Feature analysis and classification of manufacturing signatures based on semiconductor wafer maps
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
3
Conference Proceedings
An Integrated Spatial Signature Analysis and Automatic Defect Classification System
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Industry survey of automatic defect classification technologies, methods, and performance
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
An Integrated Spatial Signature Analysis and Automatic Defect Classification System
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Detection of semiconductor defects using a novel fractal encoding algorithm
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
Adaptation of the fuzzy k-nearest neighbor classifier for manufacturing automation
SPIE-The International Society for Optical Engineering |