Blank Cover Image

Evaluation of scanning electron microscope resolution

Author(s):
Publication title:
Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3332
Pub. Year:
1998
Page(from):
71
Page(to):
80
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427779 [0819427772]
Language:
English
Call no.:
P63600/3332
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Survey of scanning electron microscopes using quantitative resolution evaluation

Fanget,G.L., Martin,H.M., Florin,B.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Measurement of contact and grip force as reference for human hand transmitted vibration evaluation by laser scanning vibrometers

Marsili,R., Rossi,G.L.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings New approach in scanning electron microscope resolution evaluation

H.M. Martin, P. Perret, C. Desplat, P. Reisse

Society of Photo-optical Instrumentation Engineers
8 Conference Proceedings Advanced Nano-Scale Metrology for the Characterization of Ceramic Materials in the Scanning Electron Microscope

G. Pezzotti, A. Matsutani, M.C. Munisso, W.L. Zhu

Trans Tech Publications
3 Conference Proceedings New trends in Brunner's relation:dielectric levels

Trouiller,Y., Didiergeorges,A., Fanget,G.L., Laviron,C., Comboure,C.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings High Resolution Imaging by Means of Backscattered Electrons in the Scanning Electron Microscope

P. Wandrol, J. Matějková, A. Rek

Trans Tech Publications
4 Conference Proceedings ArF lithography for printing 100-nm gates on low-volume ASIC devices: CD budget issues related to various binary mask-making processes

Trouiller,Y., Fanget,G.L., Miramond,C., Rody,Y.F.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Critical procedure for OPC software benchmarking with maskshop consideration

Barberet,A., Galan,G., Fanget,G.L., Richoilley,J.-C., Tissier,M., Quere,Y.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Resist composition effects on ultimate resolution of negative-tone chemically amplified resists

Pain,L., Gourgon,C., Patterson,K., Scarfogliere,B., Tedesco,S.V., Fanget,G.L., Dal'Zotto,B., Ribeiro,M., Kusumoto,T., …

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Mask manufacturing contribution on 248-nm and 193-nm lithography performances

Barberet,A., Fanget,G.L., Richoilley,J.-C., Tissier,M., Quere,Y.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Pramartensitic Microstructures as Seen in the High Resolution Electron Microscope: A Study on a Ni-Al Alloy

Schryvers D., Tanner E. L., Van Tendeloo G.

Kluwer Academic Publishers
12 Conference Proceedings Mask manufacturing contribution on 248-nm and 193-nm lithography performances

Barberet,A., Fanget,G.L., Richoilley,J.-C., Tissier,M., Quere,Y.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12