Blank Cover Image

Strategy for faster blind reconstruction of tip geometry for scanned probe microscopy

Author(s):
Villarrubia,J.S. ( National Institute of Standards and Technology )  
Publication title:
Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3332
Pub. Year:
1998
Page(from):
10
Page(to):
18
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427779 [0819427772]
Language:
English
Call no.:
P63600/3332
Type:
Conference Proceedings

Similar Items:

Kelly,K.F., Sarkar,D., Oldenburg,S.J., Hale,G.D., Halas,N.J.

SPIE-The International Society for Optical Engineering

Koglin J., Fischer C. U., Brzoska D. K., Gohde W., Fuchs H.

Kluwer Academic Publishers

Postek,M.T., Vladar,A.E., Villarrubia,J.S.

SPIE - The International Society for Optical Engineering

X. Qian, J. Villarrubia, F. Tian, R. Dixson

SPIE - The International Society of Optical Engineering

Akkaraju, S., Kelly, K., Li, B., Ma, E., Meletis, E.I., Murphy, M., Palshin, V., Wang, W., Madou, M.

Electrochemical Society

Oleg Lysenko, Vladimir Grushko, Evgeni Mitskevich, Athanasios Mamalis

Materials Research Society

Villarrubia, J.S., Vladar, A.E., Lowney, J.R., Postek, M.T., Jr.

SPIE-The International Society for Optical Engineering

10 Conference Proceedings Forces in Scanning Probe Microscopy

Ciraci S.

Kluwer Academic Publishers

Abraham,M., Ehrfeld,W., Lacher,M., Marti,O., Mayr,K., Noell,W., Guthner,P., Barenz,J.

SPIE-The International Society for Optical Engineering

11 Conference Proceedings Scanning Probe Microscopy Instrumentation

Marti O., Colchero J.

Kluwer Academic Publishers

Abraham,M., Ehrfeld,W., Lacher,M., Mayr,K., Noel,W., Guthner,P., Barenz,J.

SPIE-The International Society for Optical Engineering

12 Conference Proceedings Forces in Scanning Probe Microscopy

Meyer E., Hug J. H., Luthi R., Stiefel B., Guntherodt -J. H.

Kluwer Academic Publishers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12