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Composite cantilever beam-mass structure gyroscope by a novel etching technology

Author(s):
  • Li,X. ( Fudan Univ.(China) )
  • Bao,M. ( Fudan Univ.(China) )
  • Yang,H. ( Fudan Univ.(China) )
  • Shen,S. ( Fudan Univ.(China) )
  • Wang,W. ( Shanghai Institute of Metallurgy (China) )
Publication title:
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3511
Pub. Year:
1998
Page(from):
349
Page(to):
356
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429704 [0819429708]
Language:
English
Call no.:
P63600/3511
Type:
Conference Proceedings

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