Blank Cover Image

Silicon surface micromachining by anhydrous HF gas-phase etching with methanol

Author(s):
Jang,W.I. ( Electronics and Telecommunications Research Institute (Korea) )
Choi,C.A. ( Electronics and Telecommunications Research Institute (Korea) )
Lee,C.S. ( Electronics and Telecommunications Research Institute (Korea) )
Hong,Y.S. ( Electronics and Telecommunications Research Institute (Korea) )
Lee,J.H. ( Electronics and Telecommunications Research Institute (Korea) )
Baek,J.T. ( Electronics and Telecommunications Research Institute (Korea) )
Kim,B.W. ( Electronics and Telecommunications Research Institute (Korea) )
2 more
Publication title:
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3511
Pub. Year:
1998
Page(from):
143
Page(to):
150
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429704 [0819429708]
Language:
English
Call no.:
P63600/3511
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope

Jang,W.I., Choi,C.A., Hong,Y.S., Jun,C.H., Kim,Y.T., Lee,J.H.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings GAS-PHASE ETCHING OF SILICON OXiDE WITH ANHYDROUS HF AND ISOPROPANOL

Butterbaugh, J.W., Hiatt, C.F., Gray, D.C.

Electrochemical Society
2 Conference Proceedings Characteristics of residual products in HF gas-phase etching of sacrificial oxides for silicon micromachining

Jang,W.-I., Choi,C.-A., Lee,C.-S., Hong,Y.-S., Lee,J.-H.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings Planar latch-up microactuator driven by thermoelastic force

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Kim,Y.T.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol

Jang,W.-I., Choi,C.-A., Lee,M.-L., Jun,C.-H., Kim,Y.T.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Joo,J.W.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Micromachined silicon actuators with low driving voltage and high accuracy for optical switches and tunable filters

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Kim,K.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Fabrication of highly sensitive thermal microflow sensor with surface-micromachined vacuum platform for gas and liquid applications

Jun,C.-H., Choi,C.-A., Jang,W.I., Kim,Y.T.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Control and modeling of stress in multistacked polysilicon films considering oxidation effect

Lee,C.S., Jang,W.I., Choi,C.A., Hong,Y.S., Lee,J.H., No,K., Wee,D.M.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings High Performance a-Si:H(:Cl) TFT

Kim, S.K., Lee, K.S., Choi, J.H., Kim, C.S., Jang, J.

Electrochemical Society
6 Conference Proceedings Surface-micromachined electrostatic diaphragm micropump

Jang,W.I., Lee,Y.I., Choi,C.A., Jun,C.H., Kim,Y.T.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Constitutive Analysis of the High-Temperature Deformation Behavior of Single Phase α-Ti and α+β Ti-6Al-4V Alloy

J.H. Kim, J.T. Yeom, N.K. Park, C.S. Lee

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12