Discharge annealing of ion implanted silicon
- Author(s):
- Fleddermann, C.B. ( Department of Electrical Engineering and Coordinated Science Laboratory, University of Illinois at Urbana-Champaign )
- Ianno, N.J. ( Department of Electrical Engineering and Coordinated Science Laboratory, University of Illinois at Urbana-Champaign )
- Verdeyen, J.T. ( Department of Electrical Engineering and Coordinated Science Laboratory, University of Illinois at Urbana-Champaign )
- Streetman, B.G. ( Department of Electrical Engineering and Coordinated Science Laboratory, University of Illinois at Urbana-Champaign )
- Publication title:
- Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposia proceedings
- Ser. no.:
- 4
- Pub. Year:
- 1982
- Page(from):
- 795
- Page(to):
- 800
- Pub. info.:
- New York: North Holland
- ISSN:
- 02729172
- ISBN:
- 9780444006936 [0444006931]
- Language:
- English
- Call no.:
- M23500/4
- Type:
- Conference Proceedings
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