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Optimised multi-scan e-beam annealing of MOS devices

Author(s):
  • Pollard, C.J. ( British Telecommunications Research Laboratories )
  • Glaccum, A.E. ( British Telecommunications Research Laboratories )
  • Seight, J.D. ( British Telecommunications Research Laboratories )
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. Year:
1982
Page(from):
789
Page(to):
794
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

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